Pekka Laukkanen
 


peklau@utu.fi




ORCID identifierhttps://orcid.org/0000-0003-4220-985X





Areas of expertise
surface science; semiconductor devices, surface passivation,

Research community or research topic
materials physics, semiconductor research, surfaces and interfaces

Biography

I started scientific activities as a research assistant in 1997 at Optoelectronics Research Centre (ORC) in Prof. Markus Pessa’s group, Tampere University of Technology (Finland) where I learned to grow and measure semiconductor device materials. In 2001, I moved to University of Turku (Finland) where I have focused on surface science of different semiconductors (e.g. Si, Ge, GaAs, InP, GaN, SiC) at Materials Physics group, led by Prof. Juhani Väyrynen and then by Prof. Kalevi Kokko. In December 2023, I started as a head of this group. I have a passion to connect two research areas: semiconductor technology and surface science. I see a lot of synergy and potential in increasing connection between these two disciplines which have been quite separate previously. I want to to contribute in sustainable and efficient semiconductor industry via surface-science expertise of our group. I am an experienced supervisor and mentor, with experience of guiding colleagues and students in their academic pursuits. This also extends to advising students on career opportunities outside of academia, for example, my PhD students have founded two start-up companies (Comptek Solutions 2017 and SisuSemi 2024).



Research

Our materials physics group has investigated surface properties: chemical, electronic and structural ones of traditional semiconductor crystals including silicon (Si), germanium (Ge), and III-V compound semiconductors (e.g. GaAs, GaN, InAs, InP) by means of electron diffraction (LEED), scanning tunneling microscopy and spectroscopy (STM/STS), and photoelectron spectroscopy including synchrotron-radiation spectroscopy. One goal has been to contribute a connection between two fields: surface science and the semiconductor technology. More recently we have focused on the question how to decrease surface-related electrical and optical losses in semiconductor devices like capacitors, sensors, solar cells, and transistors. We aim to understand reasons behind formation of defect levels in device surfaces, and to find new methods to decrease the amount of defect levels. In order to measure opto-electrical properties of device interfaces in particular oxide-semiconductor and metal-semiconductor interfaces, we develop own skills to manufacture semiconductor devices in clean rooms. 



Teaching

Recently I have teched the following courses at the University of Turku:

- Phases and properties of materials (Aineen olomuodot ja ominaisuudet)

- Electrical properties of solids

- Semiconductors.



Publications
  
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  •   (2026)  
    • Advanced theory and simulationsACS Applied Materials and Interfacesphysica status solidi (b)
     Srivastava, Divya; Lahti, Antti; Kokko, Kalevi; Punkkinen, Marko; Laukkanen, Pekka
    (
    A1 Refereed original research article in a scientific journal)


  • Challenges in Simultaneous Microstructuring and Hyperdoping of Germanium with Ultrafast LaserEffects of Ultrahigh Vacuum Treatments on Wet Chemically Cleaned Si Surfaces  (2026)  
    • physica status solidi (a)Reports on Progress in PhysicsModelling and Simulation in Materials Science and Engineering
     Gnatyuk, Dmytro; Hamed, Sara; Ebrahimzadeh, Masoud; Liu, Hanchen; Vahanissi, Ville; Laukkanen, Pekka; Savin, Hele; Liu, Xiaolong
    (
    A1 Refereed original research article in a scientific journal)


  • Effect of H2O2 and H2O immersions on epitaxial GaInP-GaAs interfaces: Photoluminescence and x-ray photoelectron studyEfficient surface passivation of germanium nanostructures with 1% reflectance  (2026)  
    • Applied Surface ScienceModelling and Simulation in Materials Science and Engineering
     Jahanshah Rad, Zahra; Miettinen, Mikko; Laaksonen, Johanna; Piispanen, Perttu; Punkkinen, Marko; Kokko, Kalevi; Laukkanen, Pekka; Tukiainen, Antti; Tuorila, Heidi; Piirilä, Helmer; Viheriälä, Jukka; Guina, Mircea
    (
    A1 Refereed original research article in a scientific journal)


  • Atomic Level Chemical and Structural Properties of Silicon Surface and Initial Stages of Oxidation  (2025)  
    • IEEE transactions on electron devices
     Santonen, Mikael; Lahti, Antti; Jahanshah Rad, Zahra; Miettinen, Mikko; Ebrahimzadeh, Masoud; Lehtiö, Juha-Pekka; Snellman, Enni; Laukkanen, Pekka; Punkkinen, Marko; Kokko, Kalevi; Parkkinen, Katja; Eklund, Markus
    (
    A1 Refereed original research article in a scientific journal)


  •   (2025)  
    • ACS applied electronic materials
     Antola, Anni; Laaksonen, Johanna; Huhtinen, Hannu; Angervo, Ilari; Granroth, Sari; Schulman, Alejandro; Laukkanen, Pekka; Paturi, Petriina
    (
    A1 Refereed original research article in a scientific journal)


  •   (2025)  
    • Advanced photonics research
     Jahanshah Rad, Zahra; Laaksonen, Johanna; Alitupa, Valtteri; Miettinen, Mikko; Iltanen, Kari; Lehtiö, Juha-Pekka; Granroth, Sari; Angervo, Ilari; Punkkinen, Marko; Punkkinen, Risto; Kuzmin, Mikhail; Mäkilä, Ermei; Laukkanen, Pekka; Paturi, Petriina; Kokko, Kalevi; Vuori, Sami; Lastusaari, Mika; Singh, Harishchandra; Huttula, Marko; Singh, Manvedra Narayan; Tukiainen, Antti; Tuorila, Heidi; Piirilä, Helmer; Viheriälä, Jukka; Guina, Mircea; Kozlova, Jekaterina; Rähn, Mihkel; Tamm, Aile
    (
    A1 Refereed original research article in a scientific journal)


  • Effects of ultra-high vacuum treatments on n-type Si contact resistivity  (2025)  
    • Applied Surface ScienceAdvanced Materials Interfaces
     Miettinen, Mikko; Vuorinen, Esa; Lehtio, Juha-Pekka; Rad, Zahra Jahanshah; Punkkinen, Risto; Kuzmin, Mikhail; Jarvinen, Jarno; Vahanissi, Ville; Laukkanen, Pekka; Savin, Hele; Kokko, Kalevi
    (
    A1 Refereed original research article in a scientific journal)


  • Passivation of Germanium Surfaces by HF:H2O2 Aqueous Solution  (2025)  
    • physica status solidi (RRL) - Rapid Research Letters
     Terletskaia, Mariia; Isometsä, Joonas; Miettinen, Mikko; Laukkanen, Pekka; Vähänissi, Ville; Savin, Hele
    (
    A1 Refereed original research article in a scientific journal)


  • Potential of ultrahigh-vacuum based surface treatments in silicon technology  (2025)  
    • Microelectronic Engineering
     Jahanshah Rad, Zahra; Miettinen, Mikko; Punkkinen, Risto; Suomalainen, Petri; Punkkinen, Marko; Laukkanen, Pekka; Kokko, Kalevi
    (
    A1 Refereed original research article in a scientific journal)


  • Surface Properties of p‐GaN and Formation of Nickel Metal Contacts  (2025)  
       Miettinen, Mikko; Nuutila, Vesa; Jahanshah Rad, Zahra; Ebrahimzadeh, Masoud; Ruokonen, Anni; Punkkinen, Risto; Lehtio, Juha-Pekka; Punkkinen, Marko; Laukkanen, Pekka; Kokko, Kalevi; Suihkonen, Sami; Savin, Hele; Wang, Weimin
      (
      A1 Refereed original research article in a scientific journal)


    • Transforming Schottky to Ohmic Contacts via Ultrahigh-Vacuum Engineered Interfacial Alloying  (2025)  
         Ebrahimzadeh, Masoud; Piispanen, Perttu; Granroth, Sari; Miettinen, Mikko; Angervo, Ilari; Liu, Hanchen; Otsus, Markus; Punkkinen, Risto; Punkkinen, Marko; Vähänissi, Ville; Kokko, Kalevi; Paturi, Petriina; Kukli, Kaupo; Savin, Hele; Laukkanen, Pekka
        (
        A1 Refereed original research article in a scientific journal)


      • Bridging the gap between surface physics and photonics  (2024)  
           Laukkanen, Pekka; Punkkinen, Marko; Kuzmin, Mikhail; Kokko, Kalevi; Liu, Xiaolong; Radfar, Behrad; Vähanissi, Ville; Savin, Hele; Tukiainen, Antti; Hakkarainen, Teemu; Viheriälä, Jukka; Guina, Mircea
          (
          A2 Refereed review article in a scientific journal )


        • Dry cleaning of InSb surfaces by hydrogen molecule exposure in ultrahigh vacuum  (2024)  
          • Applied Surface Science
           Jahanshah Rad, Zahra; Miettinen, Mikko; Punkkinen, Marko; Laukkanen, Pekka; Kokko, Kalevi
          (
          A1 Refereed original research article in a scientific journal)


        • Modeling the Influence of Deposition Parameters on the Crystalline Degree in the Simulation of Polycrystalline Silicon  (2024)  
             Santonen, Mikael; Lahti, Antti; Srivastava, Divya; Jahanshah Rad, Zahra; Miettinen, Mikko; Ebrahimzadeh, Masoud; Laaksonen, Johanna; Laukkanen, Pekka; Punkkinen, Marko; Kokko, Kalevi; Kuronen, Antti; Parkkinen, Katja; Eklund, Markus
            (
            A1 Refereed original research article in a scientific journal)


          • Polycrystalline silicon, a molecular dynamics study: I. Deposition and growth modes  (2024)  
               Santonen, Mikael; Lahti, Antti; Jahanshah Rad, Zahra; Miettinen, Mikko; Ebrahimzadeh, Masoud; Lehtiö, Juha-Pekka; Laukkanen, Pekka; Punkkinen, Marko; Paturi, Petriina; Kokko, Kalevi; Kuronen, Antti; Li, Wei; Vitos, Levente; Parkkinen, Katja; Eklund, Markus
              (
              A1 Refereed original research article in a scientific journal)


            • Polycrystalline silicon, a molecular dynamics study: II. Grains, grain boundaries and their structure  (2024)  
                 Lahti, Antti; Santonen, Mikael; Rad, Zahra Jahanshah; Miettinen, Mikko; Ebrahimzadeh, Masoud; Lehtiö, Juha-Pekka; Laukkanen, Pekka; Punkkinen, Marko; Paturi, Petriina; Kokko, Kalevi; Kuronen, Antti; Li, Wei; Vitos, Levente; Parkkinen, Katja; Eklund, Markus
                (
                A1 Refereed original research article in a scientific journal)


              •   (2023)  
                • Solid State Phenomena
                Ultra Clean Processing of Semiconductor Surfaces XVI: Selected peer-reviewed full text papers from the 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023) Laukkanen Pekka
                (
                A4 Refereed article in a conference publication )


              •   (2023)  
                • Solid State Phenomena
                Ultra Clean Processing of Semiconductor Surfaces XVI: Selected peer-reviewed full text papers from the 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023) Rad, Zahra Jahanshah; Miettinen, Mikko; Punkkinen, Marko; Laukkanen, Pekka; Kokko, Kalevi; Vähänissi, Ville; Savin, Hele
                (
                A1 Refereed original research article in a scientific journal)


              • 2023
                • Nanotechnology
                 Fung Tsun Hang, Isometsä Joonas, Lehtiö Juha-Pekka, Pasanen Toni P., Liu Hanchen, Leiviskä Oskari, Laukkanen Pekka, Savin Hele, Vähänissi Ville
                (
                A1 Refereed original research article in a scientific journal)


              • Plasma-enhanced atomic layer deposited SiO2 enables positive thin film charge and surface recombination velocity of 1.3 cm/s on germanium  (2023)  
                • Applied Physics Letters
                 Liu Hanchen, Pasanen Toni P., Leiviskä Oskari, Isometsä Joonas, Fung Tsun Hang, Yli-Koski Marko, Miettinen Mikko, Laukkanen Pekka, Vähänissi Ville, Savin Hele
                (
                A1 Refereed original research article in a scientific journal)



              Last updated on 20/04/2026 03:13:01 PM