A4 Refereed article in a conference publication
Atomic Level Chemical and Structural Properties of Silicon Surface and Initial Stages of Oxidation
Authors: Laukkanen Pekka
Editors: Paul Mertens, Antoine Pacco, Kurt Wostyn, Quoc Toan Le
Conference name: Ultra Clean Processing of Semiconductor Surfaces
Publisher: Trans Tech Publications Ltd
Publication year: 2023
Journal: Solid State Phenomena
Book title : Ultra Clean Processing of Semiconductor Surfaces XVI: Selected peer-reviewed full text papers from the 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023)
Journal name in source: Solid State Phenomena
Series title: Solid State Phenomena
Volume: 346
First page : 49
Last page: 56
ISBN: 978-3-0364-0312-0
eISBN: 978-3-0364-1312-9
ISSN: 1012-0394
eISSN: 1662-9779
DOI: https://doi.org/10.4028/p-9ENgNN
Web address : https://doi.org/10.4028/p-9ENgNN