A4 Refereed article in a conference publication

Atomic Level Chemical and Structural Properties of Silicon Surface and Initial Stages of Oxidation




AuthorsLaukkanen Pekka

EditorsPaul Mertens, Antoine Pacco, Kurt Wostyn, Quoc Toan Le

Conference nameUltra Clean Processing of Semiconductor Surfaces

PublisherTrans Tech Publications Ltd

Publication year2023

JournalSolid State Phenomena

Book title Ultra Clean Processing of Semiconductor Surfaces XVI: Selected peer-reviewed full text papers from the 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023)

Journal name in sourceSolid State Phenomena

Series titleSolid State Phenomena

Volume346

First page 49

Last page56

ISBN978-3-0364-0312-0

eISBN978-3-0364-1312-9

ISSN1012-0394

eISSN1662-9779

DOIhttps://doi.org/10.4028/p-9ENgNN

Web address https://doi.org/10.4028/p-9ENgNN




Last updated on 2024-26-11 at 19:17