F1 Published independent work of art

Spatial micro-processing of mono-crystallin silicon with hybrid chemical-laser etching method in KOH with the use of fiber laser

Authors: Rosowski A, Piili H, Pawlak R, Kujanpää V, Salminen A

Publication year: 2009

Journal name in source: ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings

Volume: 102

DOI: https://doi.org/10.2351/1.5061671

Web address : http://www.scopus.com/inward/record.url?eid=2-s2.0-77953909141&partnerID=MN8TOARS