A1 Refereed original research article in a scientific journal

Preferentially oriented SrTiO3 thin films grown on lanthanide-assisted Si(001) via pulsed laser deposition




AuthorsRijckaert, Hannes; Latronico, Giovanna; Deduytsche, Davy; Solano, Eduardo; Paturi, Petriina; Mele, Paolo

PublisherRoyal Society of Chemistry (RSC)

Publication year2026

Journal: Journal of Materials Chemistry. C

ISSN2050-7526

eISSN2050-7534

DOIhttps://doi.org/10.1039/d5tc03382a

Publication's open availability at the time of reportingOpen Access

Publication channel's open availability Partially Open Access publication channel

Web address https://doi.org/10.1039/d5tc03382a

Self-archived copy’s web addresshttps://research.utu.fi/converis/portal/detail/Publication/506486516


Abstract

The integration of high-quality SrTiO3 thin films on silicon substrates is crucial for various applications. This work investigates the use of an out-of-plane, self-oriented La2O2CO3 seed layer prepared via the chemical solution deposition (CSD) method as a template for SrTiO3 growth by pulsed laser deposition (PLD). The growth window of the SrTiO3 thin film was determined by in situ X-ray diffraction and by studying the thermal stability of the La2O2CO3 film. This study resulted in crack-free films with preferential but not exclusive (001) out-of-plane orientation when using one-step PLD deposition at 750 °C. Further in-depth X-ray diffraction analysis revealed that the SrTiO3 film exhibited multiple preferential orientations rather than a continuous fibre texture. Transmission electron microscopy confirmed a uniform SrTiO3 film without interfacial reactions and a homogeneous composition. These findings highlight the key role of deposition conditions in controlling crystallinity and orientation, enabling the integration of high-quality perovskite oxide on silicon.


Downloadable publication

This is an electronic reprint of the original article.
This reprint may differ from the original in pagination and typographic detail. Please cite the original version.




Funding information in the publication
H. R. acknowledges support and funding as a postdoctoral fellow for fundamental research from the Research FoundationFlanders (FWO) under grant number 1273621N. GIWAXS patterns were measured at the ALBA synchrotron facility with the collaboration of the ALBA staff.


Last updated on 07/01/2026 10:45:20 AM