Effect of H2O2 and H2O immersions on epitaxial GaInP-GaAs interfaces: Photoluminescence and x-ray photoelectron study




Jahanshah Rad, Zahra; Miettinen, Mikko; Laaksonen, Johanna; Piispanen, Perttu; Punkkinen, Marko; Kokko, Kalevi; Laukkanen, Pekka; Tukiainen, Antti; Tuorila, Heidi; Piirilä, Helmer; Viheriälä, Jukka; Guina, Mircea

PublisherElsevier

2026

 Applied Surface Science

165009

720

Part A

0169-4332

1873-5584

DOIhttps://doi.org/10.1016/j.apsusc.2025.165009

https://doi.org/10.1016/j.apsusc.2025.165009

https://research.utu.fi/converis/portal/detail/Publication/505499342



Epitaxially grown lattice-matched GaInP on a GaAs crystal is a common part in semiconductor devices such as bipolar junction transistors and space solar cells. Due to the larger band gap of GaInP, it provides also high-quality passivation for GaAs surfaces. Therefore, the photoluminescence (PL) intensity measured from GaInP-capped GaAs is among the strongest intensities obtained from GaAs crystals having different surface passivation layers. Here we demonstrate that a facile wet chemical treatment, including immersions in two solutions: first in hot hydrogen peroxide (H2O2) and then in hot water (H2O), increases the PL intensity from epitaxial GaInP/GaAs. Concomitantly, the GaInP surface is further oxidized according to x-ray photoelectron spectroscopy results. Particularly, arsenic impurities and indium at the surface become oxidized. Finally, the H2O2 → H2O treatment combination is used to modify the n-type GaAs contact layer (150 nm), deposited on the top of epitaxial GaInP/GaAs such that the PL intensity from GaAs increases by factor of two as compared to PL from the high-quality GaInP/GaAs reference. The H2O2 → H2O treatment is discussed to transform an initial n-type GaAs contact layer, which degrades the PL intensity, to an antireflective and less absorptive layer which resembles a recently reported black GaAs surface.


This work has been supported by the University of Turku Graduate School (UTUGS), the Business Finland (via the project RONASEC), the Academy of Finland (via the project #296469), and by Wihuri Foundation (Z.J.R.).


Last updated on 26/11/2025 09:39:58 AM