A1 Vertaisarvioitu alkuperäisartikkeli tieteellisessä lehdessä
Effect of H2O2 and H2O immersions on epitaxial GaInP-GaAs interfaces: Photoluminescence and x-ray photoelectron study
Tekijät: Jahanshah Rad, Zahra; Miettinen, Mikko; Laaksonen, Johanna; Piispanen, Perttu; Punkkinen, Marko; Kokko, Kalevi; Laukkanen, Pekka; Tukiainen, Antti; Tuorila, Heidi; Piirilä, Helmer; Viheriälä, Jukka; Guina, Mircea
Kustantaja: Elsevier
Julkaisuvuosi: 2026
Lehti: Applied Surface Science
Artikkelin numero: 165009
Vuosikerta: 720
Numero: Part A
ISSN: 0169-4332
eISSN: 1873-5584
DOI: https://doi.org/10.1016/j.apsusc.2025.165009
Julkaisun avoimuus kirjaamishetkellä: Avoimesti saatavilla
Julkaisukanavan avoimuus : Osittain avoin julkaisukanava
Verkko-osoite: https://doi.org/10.1016/j.apsusc.2025.165009
Rinnakkaistallenteen osoite: https://research.utu.fi/converis/portal/detail/Publication/505499342
Epitaxially grown lattice-matched GaInP on a GaAs crystal is a common part in semiconductor devices such as bipolar junction transistors and space solar cells. Due to the larger band gap of GaInP, it provides also high-quality passivation for GaAs surfaces. Therefore, the photoluminescence (PL) intensity measured from GaInP-capped GaAs is among the strongest intensities obtained from GaAs crystals having different surface passivation layers. Here we demonstrate that a facile wet chemical treatment, including immersions in two solutions: first in hot hydrogen peroxide (H2O2) and then in hot water (H2O), increases the PL intensity from epitaxial GaInP/GaAs. Concomitantly, the GaInP surface is further oxidized according to x-ray photoelectron spectroscopy results. Particularly, arsenic impurities and indium at the surface become oxidized. Finally, the H2O2 → H2O treatment combination is used to modify the n-type GaAs contact layer (150 nm), deposited on the top of epitaxial GaInP/GaAs such that the PL intensity from GaAs increases by factor of two as compared to PL from the high-quality GaInP/GaAs reference. The H2O2 → H2O treatment is discussed to transform an initial n-type GaAs contact layer, which degrades the PL intensity, to an antireflective and less absorptive layer which resembles a recently reported black GaAs surface.
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This work has been supported by the University of Turku Graduate School (UTUGS), the Business Finland (via the project RONASEC), the Academy of Finland (via the project #296469), and by Wihuri Foundation (Z.J.R.).