Atomic Level Chemical and Structural Properties of Silicon Surface and Initial Stages of Oxidation

: Laukkanen Pekka

: Paul Mertens, Antoine Pacco, Kurt Wostyn, Quoc Toan Le

: Ultra Clean Processing of Semiconductor Surfaces

Publisher: Trans Tech Publications Ltd

: 2023

: Solid State Phenomena

: Ultra Clean Processing of Semiconductor Surfaces XVI: Selected peer-reviewed full text papers from the 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023)

: Solid State Phenomena

: 346

: 49

: 56

: 978-3-0364-0312-0

: 978-3-0364-1312-9

: 1012-0394

: 1662-9779

DOI: https://doi.org/10.4028/p-9ENgNN

: https://doi.org/10.4028/p-9ENgNN