An overview of the conventional microprocessing and laser assisted techniques for fabricating microscale features

: Manninen M, Piili H, Salminen A

: 2009

ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings

: 102

DOI: https://doi.org/10.2351/1.5061515

: http://www.scopus.com/inward/record.url?eid=2-s2.0-77953888767&partnerID=MN8TOARS