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Challenges in Simultaneous Microstructuring and Hyperdoping of Germanium with Ultrafast Laser




TekijätGnatyuk, Dmytro; Hamed, Sara; Ebrahimzadeh, Masoud; Liu, Hanchen; Vahanissi, Ville; Laukkanen, Pekka; Savin, Hele; Liu, Xiaolong

KustantajaWiley

Julkaisuvuosi2026

Lehti: physica status solidi (a)

Artikkelin numeroe202500987

Vuosikerta223

Numero8

ISSN1862-6300

eISSN1862-6319

DOIhttps://doi.org/10.1002/pssa.202500987

Julkaisun avoimuus kirjaamishetkelläAvoimesti saatavilla

Julkaisukanavan avoimuus Osittain avoin julkaisukanava

Verkko-osoitehttps://doi.org/10.1002/pssa.202500987

Rinnakkaistallenteen osoitehttps://research.utu.fi/converis/portal/detail/Publication/523237968

Rinnakkaistallenteen lisenssiCC BY

Rinnakkaistallennetun julkaisun versioKustantajan versio


Tiivistelmä

Germanium's compatibility with Complementary Metal-Oxide-Semiconductor (CMOS) and strong near-infrared response make it an attractive platform for infrared photonics, but its intrinsic material properties hinder straightforward extension of absorption beyond the band edge. In this perspective, we synthesize recent and new experiments and analyses on femtosecond-laser approaches that attempt to combine surface microstructuring and hyperdoping of Ge in a single step. We argue that, unlike silicon, Ge's high optical absorption at visible/green wavelengths, shallow energy deposition, lower melting point, and reduced thermal conductivity favor intense localized heating, evaporation, and redeposition-conditions that both produce high baseline sub-bandgap absorption from damage and prevent effective incorporation of thin-film dopant precursors. In a case example, Ti shows only trace incorporation from qualitative measurements. We discuss why laser-induced structural disorder, rather than stable deep dopant incorporation, dominates the optical response, and we outline practical pathways forward: exploring longer wavelengths or gas-phase chemistries, applying separate in situ heating, or decoupling texturing from heavy doping.


Ladattava julkaisu

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Julkaisussa olevat rahoitustiedot
This study was supported by Research Council of Finland through project HyperGer (354199), NIR-REM (365427), and PREIN (346529).


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