A1 Refereed original research article in a scientific journal

In situ growth of ultrathin Y2O3 capping layers for Eu-organic thin films via atomic/molecular layer deposition




AuthorsJussila, Topias; Pekkanen, Joona; Virta, Anni; Ghazy, Amr; Lastusaari, Mika; Karppinen, Maarit

PublisherA V S AMER INST PHYSICS

Publishing placeMELVILLE

Publication year2025

JournalJournal of Vacuum Science and Technology A

Journal name in sourceJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Journal acronymJ VAC SCI TECHNOL A

Article number022406

Volume43

Issue2

Number of pages9

ISSN0734-2101

eISSN1520-8559

DOIhttps://doi.org/10.1116/6.0004237

Web address https://doi.org/10.1116/6.0004237

Self-archived copy’s web addresshttps://research.utu.fi/converis/portal/detail/Publication/491381098


Abstract

Metal-organic thin films fabricated through industry-feasible atomic/molecular layer deposition (ALD/MLD) routes are highly attractive materials with diverse functional properties, but they suffer from poor chemical stability in ambient (humid) conditions and especially in direct contact with liquids which limits their practical implementation. The most efficient way to protect the inherently unstable thin films is to encapsulate them with chemically inert material layers without exposing the metal-organic material to air during the processing. Here, we demonstrate the robust in situ encapsulation of luminescent ALD/MLD-grown Eu-organic (europium hydroxyquinoline carboxylate) thin films with ultrathin (1-12 nm) ALD-grown Y2O3 capping layers deposited under the same deposition conditions. From x-ray reflectivity analysis, the successful capping-layer formation with only a minor etching effect on the underlining Eu-organic film was confirmed despite the use of the strongly oxidizing reactant (O-3) for the ALD Y2O3 process. Importantly, the film composition and luminescent properties were not compromised by the etching. The stability of the encapsulated thin films was studied in both dry and humid air, as well as in liquid water. The results revealed that already a 3-4 nm Y2O3 capping layer effectively increases the Eu-organic film stability both when stored in open air and when exposed to liquid water. The enhanced stability in the liquid environment is, in particular, critical for the use of Eu-organic thin films for bioimaging applications.


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Funding information in the publication
Funding was received from the European Union (ERC AdG, UniEnMLD, No. 101097815).


Last updated on 2025-04-04 at 13:41