Abstract. We describe the use of Bayesian analysis methods applied to TOF-SIMS spectra. The method finds the probability density functions of measured line parameters (number of lines, and their widths, peak amplitudes, integrated amplitudes, positions) in mass intervals over the whole spectrum. We discuss the results we can expect from this analysis. We discuss the effects the instrument dead time causes in the COSIMA TOF SIMS. We address this issue in a new way. The derived line parameters can be used to further calibrate the mass scaling of TOF-SIMS and to feed the results into other analysis methods such as multivariate analyses of spectra. We intend to use the method in two ways, first as a comprehensive tool to perform quantitative analysis of spectra, and second as a fast tool for studying interesting targets for obtaining additional TOF-SIMS measurements of the sample, a property unique for COSIMA. Finally, we point out that the Bayesian method can be thought as a means to solve inverse problems but with forward calculations only.