A1 Refereed original research article in a scientific journal

Oxidation-Induced Changes in the ALD-Al2O3/InAs(100) Interface and Control of the Changes for Device Processing

Authors: Marjukka Tuominen, Jaakko Mäkelä, Muhammad Yasir, Johnny Dahl, Sari Granroth, Juha-Pekka Lehtiö, Roberto Félix, Pekka Laukkanen, Mikhail Kuzmin, Mikko Laitinen, Marko P.J. Punkkinen, Hannu-Pekka Hedman, Risto Punkkinen, Ville Polojärvi, Jari Lyytikäinen, Antti Tukiainen, Mircea Guina, Kalevi Kokko

Publisher: American Chemical Society

Publication year: 2018

Journal: ACS Applied Materials and Interfaces

Volume: 10

Issue: 51

First page : 44932

Last page: 44940

Number of pages: 9

ISSN: 1944-8244

eISSN: 1944-8252

DOI: https://doi.org/10.1021/acsami.8b17843

Self-archived copy’s web address: https://research.utu.fi/converis/portal/detail/Publication/37469235