Other publication

Manufacturing Of Foreign Oxide On Semiconductor

Authors: P. Laukkanen, M. Kuzmin, M. Yasir, M. Tuominen, J. Dahl, V. Tuominen, J. Mäkelä, M. Punkkinen, K. Kokko

Publication year: 2015

Web address : http://patent.prh.fi/pubserver/documentpdf.jsp?iDocId=76006&sDummyParam=.pdf