A1 Refereed original research article in a scientific journal
Inexpensive substrate heater for oxidizing environments
Authors: Paturi P, Huhtinen H, Laiho R
Publisher: AMER INST PHYSICS
Publication year: 1998
Journal:: Review of Scientific Instruments
Journal name in source: REVIEW OF SCIENTIFIC INSTRUMENTS
Journal acronym: REV SCI INSTRUM
Volume: 69
Issue: 11
First page : 3945
Last page: 3947
Number of pages: 3
ISSN: 0034-6748
DOI: https://doi.org/10.1063/1.1149203
Abstract
We describe a substrate heater constructed for use in an oxidizing environment in the temperature range of T less than or equal to 900 degrees C. The heating element is an ordinary projection lamp working in ambient near the end of a quartz tube fixed with a flange to a vacuum chamber. On the vacuum (outer) side of the tube is a smooth fitting stainless steel cylinder that conducts the heat to the region of the substrate. For fixing or removing the substrate the cylinder can be simply pulled off its position on the quartz tube. The heater that is described has been used, for example, for laser ablation of YBa2Cu3O6+x superconducting films. (C) 1998 American Institute of Physics. [S0034- 6748(98)03911-2].
We describe a substrate heater constructed for use in an oxidizing environment in the temperature range of T less than or equal to 900 degrees C. The heating element is an ordinary projection lamp working in ambient near the end of a quartz tube fixed with a flange to a vacuum chamber. On the vacuum (outer) side of the tube is a smooth fitting stainless steel cylinder that conducts the heat to the region of the substrate. For fixing or removing the substrate the cylinder can be simply pulled off its position on the quartz tube. The heater that is described has been used, for example, for laser ablation of YBa2Cu3O6+x superconducting films. (C) 1998 American Institute of Physics. [S0034- 6748(98)03911-2].
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