A1 Vertaisarvioitu alkuperäisartikkeli tieteellisessä lehdessä
Inexpensive substrate heater for oxidizing environments
Tekijät: Paturi P, Huhtinen H, Laiho R
Kustantaja: AMER INST PHYSICS
Julkaisuvuosi: 1998
Lehti:: Review of Scientific Instruments
Tietokannassa oleva lehden nimi: REVIEW OF SCIENTIFIC INSTRUMENTS
Lehden akronyymi: REV SCI INSTRUM
Vuosikerta: 69
Numero: 11
Aloitussivu: 3945
Lopetussivu: 3947
Sivujen määrä: 3
ISSN: 0034-6748
DOI: https://doi.org/10.1063/1.1149203
Tiivistelmä
We describe a substrate heater constructed for use in an oxidizing environment in the temperature range of T less than or equal to 900 degrees C. The heating element is an ordinary projection lamp working in ambient near the end of a quartz tube fixed with a flange to a vacuum chamber. On the vacuum (outer) side of the tube is a smooth fitting stainless steel cylinder that conducts the heat to the region of the substrate. For fixing or removing the substrate the cylinder can be simply pulled off its position on the quartz tube. The heater that is described has been used, for example, for laser ablation of YBa2Cu3O6+x superconducting films. (C) 1998 American Institute of Physics. [S0034- 6748(98)03911-2].
We describe a substrate heater constructed for use in an oxidizing environment in the temperature range of T less than or equal to 900 degrees C. The heating element is an ordinary projection lamp working in ambient near the end of a quartz tube fixed with a flange to a vacuum chamber. On the vacuum (outer) side of the tube is a smooth fitting stainless steel cylinder that conducts the heat to the region of the substrate. For fixing or removing the substrate the cylinder can be simply pulled off its position on the quartz tube. The heater that is described has been used, for example, for laser ablation of YBa2Cu3O6+x superconducting films. (C) 1998 American Institute of Physics. [S0034- 6748(98)03911-2].
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