A1 Refereed original research article in a scientific journal

Rapid low-temperature processing of metal-oxide thin film transistors with combined far ultraviolet and thermal annealing

Authors: J. Leppäniemi, K. Ojanperä, T. Kololuoma, O.-H. Huttunen, J. Dahl, M. Tuominen, P. Laukkanen, H. Majumdar, A. Alastalo

Publication year: 2014

Journal: Applied Physics Letters

Article number: 113514

Volume: 105

Issue: 11

Number of pages: 5

ISSN: 0003-6951

DOI: https://doi.org/10.1063/1.4895830