Refereed article in conference proceedings (A4)

Atomic Level Chemical and Structural Properties of Silicon Surface and Initial Stages of Oxidation

List of Authors: Laukkanen Pekka

Editors: Paul Mertens, Antoine Pacco, Kurt Wostyn, Quoc Toan Le

Conference name: Ultra Clean Processing of Semiconductor Surfaces

Publisher: Trans Tech Publications Ltd

Publication year: 2023

Journal: Solid State Phenomena

Book title *: Ultra Clean Processing of Semiconductor Surfaces XVI: Selected peer-reviewed full text papers from the 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023)

Journal name in source: Solid State Phenomena

Title of series: Solid State Phenomena

Volume number: 346

Start page: 49

End page: 56

ISBN: 978-3-0364-0312-0

eISBN: 978-3-0364-1312-9

ISSN: 1012-0394

eISSN: 1662-9779

DOI: http://dx.doi.org/10.4028/p-9ENgNN

URL: https://doi.org/10.4028/p-9ENgNN