A1 Refereed original research article in a scientific journal

The self out-of-plane oriented La2O2CO3 film: an integration tool for fiber textured ferroelectric thin films




AuthorsPicavet Ewout, Rijckaert Hannes, Solano Eduardo, Bikondoa Oier, Fernandez Edgar Gutierrez, Paturi Petriina, Van Bossele Laura, Vrielinck Henk, Beeckman Jeroen, De Buysser Klaartje

PublisherROYAL SOC CHEMISTRY

Publication year2023

JournalJournal of Materials Chemistry. C

Journal name in sourceJOURNAL OF MATERIALS CHEMISTRY C

Journal acronymJ MATER CHEM C

Volume11

Issue23

First page 7705

Last page7713

Number of pages9

ISSN2050-7526

DOIhttps://doi.org/10.1039/d3tc01046e

Web address https://doi.org/10.1039/D3TC01046E

Self-archived copy’s web addresshttps://biblio.ugent.be/publication/01H1KJE83F07R4ZMAHHKV1Q92V/file/01H1SW3XP9XJ0H7107NSZVDDCF.pdf


Abstract

A crucial role in the miniaturization of electronic and photonic components is played by the integration of ferroelectric thin films on silicon (Si) or silicon nitride (SiN) based platforms. Since the properties of ferroelectric thin films strongly depend on their texture quality and crystallographic orientation, the integration of thin films on these platforms is far from trivial. Consequently, this leads to slow, complex and expensive integration processes. To bridge this gap, a high-throughput method for the integration of highly textured ferroelectric thin films on Si or SiN-based platforms is needed. Therefore, we have investigated a method to facilitate the integration of fiber textured ferroelectric thin films by using an ultrathin (~ 7 nm) self out-of-plane oriented La2O2CO3 template film. In this paper, we report a local deposition route of the La2O2CO3 thin film by the scalable inkjet printing method, its inherent out-of-plane crystal orientation, and its lattice match with various ferroelectric thin films. The use of the La2O2CO3 template film as an integration tool for (Pb(Zr,Ti)O3, BaTiO3, and BiFeO3) thin films eventually results in strongly fiber-textured ferroelectric stacks, regardless of substrate type. Consequently, the La2O2CO3 thin film has the potential to serve as a high-throughput integration tool for fiber textured ferroelectric thin films on Si or SiN-based platforms. Moreover, this integration tool could pave the way for large-scale miniaturization of photonic or electronic devices such as phase modulators, resonators, capacitors, etc.



Last updated on 2024-26-11 at 11:41