A1 Vertaisarvioitu alkuperäisartikkeli tieteellisessä lehdessä
Carbonization of porous silicon optical gas sensors for enhanced stability and sensitivity
Tekijät: Torres-Costa V, Salonen J, Jalkanen TM, Lehto VP, Martin-Palma RJ, Martinez-Duart JM
Kustantaja: WILEY-V C H VERLAG GMBH
Julkaisuvuosi: 2009
Lehti:: physica status solidi (a)
Tietokannassa oleva lehden nimi: PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Lehden akronyymi: PHYS STATUS SOLIDI A
Vuosikerta: 206
Numero: 6
Aloitussivu: 1306
Lopetussivu: 1308
Sivujen määrä: 3
ISSN: 1862-6300
DOI: https://doi.org/10.1002/pssa.200881052
Tiivistelmä
Nanostructured porous silicon (PS) optical filters have been widely proposed for their use in biological and chemical sensing applications. Porous silicon, however, presents a reactive surface that must be adequately passivated in order to achieve the required chemical stability mandatory for sensing applications. In the present work, thermal carbonization by acetylene decomposition (TCAD) is shown to provide sivation of PS internal surface, as well as an enhancement of the device's sensitivity to certain species. Moreover, it is shown that the TCAD process, as opposed to more common oxidation treatments, has only minor effects on the optical properties of PS. Thus, the optical performance of PS interference filters is preserved after the carbonization process. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Nanostructured porous silicon (PS) optical filters have been widely proposed for their use in biological and chemical sensing applications. Porous silicon, however, presents a reactive surface that must be adequately passivated in order to achieve the required chemical stability mandatory for sensing applications. In the present work, thermal carbonization by acetylene decomposition (TCAD) is shown to provide sivation of PS internal surface, as well as an enhancement of the device's sensitivity to certain species. Moreover, it is shown that the TCAD process, as opposed to more common oxidation treatments, has only minor effects on the optical properties of PS. Thus, the optical performance of PS interference filters is preserved after the carbonization process. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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