A1 Refereed original research article in a scientific journal
Carbonization of porous silicon optical gas sensors for enhanced stability and sensitivity
Authors: Torres-Costa V, Salonen J, Jalkanen TM, Lehto VP, Martin-Palma RJ, Martinez-Duart JM
Publisher: WILEY-V C H VERLAG GMBH
Publication year: 2009
Journal:: physica status solidi (a)
Journal name in source: PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Journal acronym: PHYS STATUS SOLIDI A
Volume: 206
Issue: 6
First page : 1306
Last page: 1308
Number of pages: 3
ISSN: 1862-6300
DOI: https://doi.org/10.1002/pssa.200881052
Abstract
Nanostructured porous silicon (PS) optical filters have been widely proposed for their use in biological and chemical sensing applications. Porous silicon, however, presents a reactive surface that must be adequately passivated in order to achieve the required chemical stability mandatory for sensing applications. In the present work, thermal carbonization by acetylene decomposition (TCAD) is shown to provide sivation of PS internal surface, as well as an enhancement of the device's sensitivity to certain species. Moreover, it is shown that the TCAD process, as opposed to more common oxidation treatments, has only minor effects on the optical properties of PS. Thus, the optical performance of PS interference filters is preserved after the carbonization process. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Nanostructured porous silicon (PS) optical filters have been widely proposed for their use in biological and chemical sensing applications. Porous silicon, however, presents a reactive surface that must be adequately passivated in order to achieve the required chemical stability mandatory for sensing applications. In the present work, thermal carbonization by acetylene decomposition (TCAD) is shown to provide sivation of PS internal surface, as well as an enhancement of the device's sensitivity to certain species. Moreover, it is shown that the TCAD process, as opposed to more common oxidation treatments, has only minor effects on the optical properties of PS. Thus, the optical performance of PS interference filters is preserved after the carbonization process. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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