This study demonstrated a highly sensitive hydrogen sensor consisting of Pd-decorated TiO₂ tubular structures on SiO₂/Si substrate. Ti layer was deposited on a thermally oxidized Si substrate with patterned metal electrodes. TiO₂ nanotubes were prepared by an anodization of Ti layer in an organic electrolyte containing NH₄F 0.3 wt.% in ethylene glycol. Thin Pd layer was deposited on the detection area of the TiO₂ layer to enhance detection abilities. The formation of the TiO₂ layers on both the metal electrode and SiO₂layers was investigated by FESEM and EDS. After annealing at 500 °C, the crystalline phase transformation from amorphous to anatase was confirmed by XRD. The hydrogen sensing properties of the sensor were investigated in synthetic air, nitrogen and humid air at 140–180 °C. The Pd deposition effectively improved the hydrogen sensing abilities of the sensor due to catalytic effect of Pd. The sensor showed promising hydrogen sensing characteristics, such as a high response, a wide detection range (1 ppm–1%), a fast reaction time and a good selectivity. This sensor fabrication process can offer feasibility for mass production of micro scaled sensors using anodically prepared TiO₂ sensors.