A1 Refereed original research article in a scientific journal

An Exceptional Method for Manufacturing of Amorphous and Porous Silicon




AuthorsTimo Ala-Kleme

PublisherBentham Science

Publication year2015

JournalMicro and Nanosystems

Volume7

Issue1

First page 23

Last page30

Number of pages8

DOIhttps://doi.org/10.2174/1871530315666150521124747




Last updated on 2024-26-11 at 19:58