Porous silicon micro- and nanoparticles for printed humidity sensors

: Jalkanen T, Makila E, Maattanen A, Tuura J, Kaasalainen M, Lehto VP, Ihalainen P, Peltonen J, Salonen J

Publisher: AMER INST PHYSICS

: 2012

: Applied Physics Letters

: APPLIED PHYSICS LETTERS

: APPL PHYS LETT

: ARTN 263110

: 26

: 101

: 26

: 4

: 0003-6951

DOI: https://doi.org/10.1063/1.4773361(external)

In this work, the feasibility of porous silicon particles for producing printed humidity sensors is examined. A proof of concept is provided by producing fully functional humidity sensors on a glass substrate by drop casting a particle solution on top of inkjet printed silver electrodes. Sensor sensitivity towards changes in relative humidity is examined. The results show that the sensors provide good sensitivity and reproducible results throughout the entire relative humidity range. In addition, negligibly small hysteresis accompanied by relatively fast response and recovery times is also demonstrated. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4773361]