A1 Refereed original research article in a scientific journal
Line shape and composition of the In 3d5/2 core-level photoemission for the interface analysis of In-containing III-V semiconductors
Authors: J. Mäkelä, M. Tuominen, M. Kuzmin, M. Yasir, J. Lång, M.P.J Punkkinen, P. Laukkanen, K. Kokko, K. Schulte, J. Osiecki, R.M. Wallace
Publisher: Elsevier
Publication year: 2015
Journal: Applied Surface Science
Volume: 329
First page : 371
Last page: 375
Number of pages: 5
ISSN: 0169-4332
eISSN: 0169-4332
DOI: https://doi.org/10.1016/j.apsusc.2014.12.155(external)
The In 3d5/2 photoelectron spectroscopy peak has been widely used to determine the interface structures of In-containing III-V device materials (e.g., oxidation states). However, an unclear parameter affecting the determination of the energy shifts and number of the core-level components, and therefore, the interpreted interface structure and composition, is still the intrinsic In 3d5/2 peak line shape. It is undecided whether the line shape is naturally symmetric or asymmetric for pure In-containing III-V compounds. By using high-resolution photoelectron spectroscopy, we show that the In 3d5/2 asymmetry arising from the emission at high binding-energy tail is not an intrinsic property of InAs, InP, InSb and InGaAs. Furthermore, it is shown that asymmetry of In 3d5/2 peaks of pure III-V’s originates from the natural surface reconstructions which cause the coexistence of slightly shifted In 3d5/2 components with the symmetric peak shape and dominant Lorentzian broadening.
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