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Electrical properties of surface and interface layers of the N- and In-polar undoped and Mg-doped InN layers grown by PA MBE




TekijätT. A. Komissarova, E. Kampert, J. Law, V. N. Jmerik, P. Paturi, X. Wang, A. Yoshikawa, S. V. Ivanov

KustantajaAMER INST PHYSICS

Julkaisuvuosi2018

JournalApplied Physics Letters

Tietokannassa oleva lehden nimiAPPLIED PHYSICS LETTERS

Lehden akronyymiAPPL PHYS LETT

Artikkelin numero022104

Vuosikerta112

Numero2

Sivujen määrä4

ISSN0003-6951

DOIhttps://doi.org/10.1063/1.5009794


Tiivistelmä
Electrical properties of N-polar undoped and Mg-doped InN layers and In-polar undoped InN layers grown by plasma-assisted molecular beam epitaxy (PA MBE) were studied. Transport parameters of the surface and interface layers were determined from the measurements of the Hall coefficient and resistivity as well as the Shubnikov-de Haas oscillations at magnetic fields up to 60 T. Contributions of the 2D surface, 3D near-interface, and 2D interface layers to the total conductivity of the InN films were defined and discussed to be dependent on InN surface polarity, Mg doping, and PA MBE growth conditions. Published by AIP Publishing.



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