Structural considerations on multistopband mesoporous silicon rugate filters prepared for gas sensing purposes




Jalkanen T, Salonen J, Torres-Costa V, Fukami K, Sakka T, Ogata YH

PublisherOPTICAL SOC AMER

2011

Optics Express

OPTICS EXPRESS

OPT EXPRESS

14

19

14

13291

13305

15

1094-4087

DOIhttps://doi.org/10.1364/OE.19.013291



Different designs for producing multiple stopband mesoporous silicon rugate filters via electrochemical anodization are compared. The effects of light absorption and dispersion to visible range filter design are investigated. Thermal oxidation is applied for passivating the chemically reactive porous silicon surface, and the response of the passivated structures to ethanol vapor is examined. Differences in gas sensing properties for the various designs are evaluated and possible reasons for the observed differences are discussed. Methods for sidelobe suppression in multipeak filters are discussed and demonstrated, and their effects in gas sensing applications are estimated. (C) 2011 Optical Society of America



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