A1 Vertaisarvioitu alkuperäisartikkeli tieteellisessä lehdessä
Laser deposition from a nanostructured YBaCuO target: Analysis of the plume and growth kinetics of particles on SrTiO3
Tekijät: Huhtinen H, Jarvinen J, Laiho R, Paturi P, Raittila J
Kustantaja: AMER INST PHYSICS
Julkaisuvuosi: 2001
Lehti:: Journal of Applied Physics
Tietokannassa oleva lehden nimi: JOURNAL OF APPLIED PHYSICS
Lehden akronyymi: J APPL PHYS
Vuosikerta: 90
Numero: 3
Aloitussivu: 1521
Lopetussivu: 1528
Sivujen määrä: 8
ISSN: 0021-8979
DOI: https://doi.org/10.1063/1.1380990
Tiivistelmä
The plume generated by a pulsed XeCl laser from a novel nanostructured YBaCuO target (n target) is investigated by methods of optical emission spectroscopy and atomic force microscopy. While the spectral positions of the emission lines are the same, stronger line intensities, pertinent to higher kinetic energy of the particles, are observed in the plumes generated from the n target than from a target having micron size grains (m target). The size of small clusters captured on Si plates assembled inside the plume grows in directions perpendicular to the axis of the plume. As shown by x-ray photoelectron spectroscopy investigations, in the particles deposited on a SrTiO3 substrate at T-s=700 degreesC in oxygen the correct 1-2-3 composition is achieved. The average ratio of the heights of the particles deposited from the n target and from the m target is h(n)/h(m)=0.6, both in the plume and on SrTiO3. This can explain the smoothness of YBaCuO films prepared by laser deposition from the n targets. (C) 2001 American Institute of Physics.
The plume generated by a pulsed XeCl laser from a novel nanostructured YBaCuO target (n target) is investigated by methods of optical emission spectroscopy and atomic force microscopy. While the spectral positions of the emission lines are the same, stronger line intensities, pertinent to higher kinetic energy of the particles, are observed in the plumes generated from the n target than from a target having micron size grains (m target). The size of small clusters captured on Si plates assembled inside the plume grows in directions perpendicular to the axis of the plume. As shown by x-ray photoelectron spectroscopy investigations, in the particles deposited on a SrTiO3 substrate at T-s=700 degreesC in oxygen the correct 1-2-3 composition is achieved. The average ratio of the heights of the particles deposited from the n target and from the m target is h(n)/h(m)=0.6, both in the plume and on SrTiO3. This can explain the smoothness of YBaCuO films prepared by laser deposition from the n targets. (C) 2001 American Institute of Physics.
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