A1 Journal article – refereed
Oxidation-Induced Changes in the ALD-Al2O3/InAs(100) Interface and Control of the Changes for Device Processing




List of Authors: Marjukka Tuominen, Jaakko Mäkelä, Muhammad Yasir, Johnny Dahl, Sari Granroth, Juha-Pekka Lehtiö, Roberto Félix, Pekka Laukkanen, Mikhail Kuzmin, Mikko Laitinen, Marko P.J. Punkkinen, Hannu-Pekka Hedman, Risto Punkkinen, Ville Polojärvi, Jari Lyytikäinen, Antti Tukiainen, Mircea Guina, Kalevi Kokko
Publisher: American Chemical Society
Publication year: 2018
Journal: ACS Applied Materials and Interfaces
Volume number: 10
Issue number: 51
eISSN: 1944-8252


Last updated on 2019-17-01 at 18:50